Company Filing History:
Years Active: 1999-2013
Title: The Innovative Contributions of Rene De Blank
Introduction
Rene De Blank is a notable inventor based in Heverlee, Belgium. She has made significant contributions to the field of materials science, particularly in the area of substrate surface protection during deposition processes. With a total of 3 patents to her name, her work has had a substantial impact on the industry.
Latest Patents
Rene De Blank's latest patents focus on the prevention of oxidation of substrate surfaces in process chambers. In one embodiment, a reducing gas ambient containing a reducing agent is established in a batch process chamber before substrates are subjected to deposition. This reducing atmosphere is created before and/or during the loading of the substrates into the process chamber, which can include flowing reducing gas into the chamber while it is open. The use of this reducing gas ambient effectively reduces oxidation of substrate surfaces.
Another significant patent addresses the protection of conductors from oxidation in deposition chambers. After depositing conductive material on substrates, a reducing gas is introduced into the chamber in preparation for unloading the substrates. This process is particularly relevant in batch CVD chambers where the deposited material may include metal nitrides, such as titanium metal nitride. By introducing a reducing gas during the backfill and cooling process, the effects of oxidation on exposed metal-containing films are minimized, thereby enhancing the conductive properties of these films.
Career Highlights
Throughout her career, Rene De Blank has worked with prominent companies such as ASM International N.V. and IMEC VZW. Her experience in these organizations has allowed her to develop and refine her innovative ideas, contributing to advancements in the field.
Collaborations
Rene has collaborated with notable colleagues, including Steven Verhaverbeke and Mark Heyns. These partnerships have fostered a creative environment that has led to the development of her impactful patents.
Conclusion
Rene De Blank's innovative work in the field of substrate surface protection has led to significant advancements in deposition processes. Her contributions continue to influence the industry, showcasing the importance of innovation in materials science.