Reiko Hinogami

Title: The Innovative Contributions of Reiko Hinogami

Introduction

Reiko Hinogami is a prominent inventor based in Kawabe-gun, Japan. She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her work focuses on improving mask pattern generation and semiconductor fabrication processes.

Latest Patents

Hinogami's latest patents include a mask pattern generating method and a mask pattern generating apparatus. This invention establishes a mask pattern correcting technique that reduces the load on the mask CAD process while ensuring the minimum dimension defined in an Optical Proximity Correction (OPC) process. The method involves measuring the line width of a mask pattern, extracting edges where the line width is smaller than a predetermined dimension, and generating a central geometrical object to replace the inadequate portions. This innovation notably reduces the number of geometrical object calculating steps, thereby shortening the mask CAD processing time.

Another significant patent is related to a semiconductor device and the method for fabricating it. This process includes depositing a metal film on an insulating film on a semiconductor substrate, forming a first interlayer insulating film, and creating first connection plugs. The method continues with the formation of a second interlayer insulating film and second connection plugs, ultimately leading to the etching of the metal film to form metal interconnects. This innovative approach also includes the formation of an air gap between the metal interconnects, enhancing the device's performance.

Career Highlights

Reiko Hinogami is currently employed at Matsushita Electric Industrial Co., Ltd., where she continues to develop groundbreaking technologies in the semiconductor industry. Her expertise and innovative mindset have positioned her as a key player in her field.

Collaborations

Hinogami has collaborated with notable coworkers, including Hideo Nakagawa and Eiji Tamaoka. These partnerships have contributed to her success and the advancement of her inventions.

Conclusion

Reiko Hinogami's contributions to semiconductor technology through her innovative patents demonstrate her significant impact on the industry. Her work not only enhances manufacturing processes but also paves the way for future advancements in technology.