Chiba, Japan

Reika Ko


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 433(Granted Patents)


Company Filing History:


Years Active: 2016

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1 patent (USPTO):Explore Patents

Title: Reika Ko: Innovator in Plasma Etching Technology

Introduction: Reika Ko is a prominent inventor based in Chiba, Japan. She has made significant contributions to the field of semiconductor manufacturing, particularly through her innovative work in plasma etching technology. With a focus on enhancing the efficiency and precision of semiconductor processing, her inventions have the potential to impact the electronics industry significantly.

Latest Patents: Reika Ko holds a patent for a "Plasma etching apparatus and plasma etching method." This invention includes a mounting table that holds a semiconductor substrate, a first heater that heats the central region of the substrate, a second heater for the edge region, a reactant gas supply unit, and a control unit that manages the plasma etching process. This technology allows for different temperature control in various regions of the substrate, improving the etching process's effectiveness.

Career Highlights: Reika Ko is currently employed at Tokyo Electron Limited, a leading company in the semiconductor equipment industry. Her work at Tokyo Electron has allowed her to collaborate with other talented professionals and contribute to groundbreaking advancements in semiconductor technology.

Collaborations: Reika has worked alongside notable colleagues such as Naoki Matsumoto and Kazuto Takai. Their combined expertise has fostered an environment of innovation and creativity within their projects.

Conclusion: Reika Ko's contributions to plasma etching technology exemplify her dedication to advancing semiconductor manufacturing. Her innovative spirit and collaborative efforts continue to drive progress in the industry.

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