Evansville, IN, United States of America

Ram W Sabnis

USPTO Granted Patents = 9 

 

Average Co-Inventor Count = 2.7

ph-index = 6

Forward Citations = 76(Granted Patents)


Location History:

  • Rolla, MO (US) (1998 - 2005)
  • Evansville, IN (US) (2005 - 2008)

Company Filing History:


Years Active: 1998-2008

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9 patents (USPTO):Explore Patents

Title: Innovations of Ram W Sabnis

Introduction

Ram W Sabnis is a notable inventor based in Evansville, IN (US). He has made significant contributions to the field of lithography and polymeric coatings, holding a total of 9 patents. His work focuses on developing innovative processes that enhance the efficiency and effectiveness of various applications in the semiconductor industry.

Latest Patents

Among his latest patents, the "Lithography pattern shrink process and articles" stands out. This invention provides novel processes for applying a thin, uniform, conformal organic polymeric film onto lithography pattern substrates. The processes result in the equal shrinking of gaps in the lithography pattern, producing smaller dimensions. The amount of pattern shrinkage can be selectively controlled by adjusting the deposition rate, allowing for the desired final structure dimension. The methods are applicable to various patterning techniques in lithography, including gate layers, ion implantation, and dielectric patterning. Additionally, his patent on "Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition" offers an improved method for applying antireflective coatings to substrate surfaces. This method utilizes plasma enhanced chemical vapor deposition (PECVD) to polymerize monomers onto substrate surfaces, resulting in highly conformal coatings with faster deposition rates compared to conventional methods.

Career Highlights

Throughout his career, Ram W Sabnis has worked with prominent companies such as Brewer Science, Inc. and Nissan Chemical Industries Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in his field.

Collaborations

Ram has collaborated with notable individuals in the industry, including Terry Lowell Brewer and Douglas J Guerrero. These partnerships have further enriched his work and led to innovative solutions in lithography and polymer applications.

Conclusion

Ram W Sabnis is a distinguished inventor whose contributions to lithography and polymeric coatings have significantly impacted the industry. His innovative patents and collaborations reflect his commitment to advancing technology in a sustainable and cost-effective manner.

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