Ralf Frese

Title: Ralf Frese: Innovator in EUV Lens Measurement Technology

Introduction

Ralf Frese is a notable inventor based in Oberkochen, Germany. He has made significant contributions to the field of optical engineering, particularly in the measurement of imaging quality for extreme ultraviolet (EUV) lenses. His innovative work has implications for various applications in the semiconductor industry.

Latest Patents

Ralf Frese holds a patent for a measuring system designed to assess the imaging quality of an EUV lens. This system includes a diffractive test structure and a measurement light radiating device that emits light in the EUV wavelength range. The system also features a variation device for adjusting image-determining parameters, a detector for capturing an image stack, and an evaluation device that determines the lens's imaging quality from the collected images. This patent showcases his expertise in developing advanced measurement technologies.

Career Highlights

Frese is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and solutions. His work at Zeiss has allowed him to collaborate with other talented professionals in the field, enhancing the company's innovative capabilities.

Collaborations

Ralf Frese has worked alongside colleagues such as Michael Samaniego and Markus Deguenther. Their collaborative efforts contribute to the advancement of optical measurement technologies and the development of high-quality imaging systems.

Conclusion

Ralf Frese's contributions to the field of EUV lens measurement technology highlight his role as an influential inventor. His patent and work at Carl Zeiss SMT GmbH demonstrate his commitment to innovation in optical engineering.