This inventor holds 4 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2009-2012.
Company Filing History:
Years Active: 2009-2012
Title: Innovations of Rajesh Kanuri in Optical Absorber Technology
Introduction
Rajesh Kanuri is an accomplished inventor based in Santa Clara, CA (US). He has made significant contributions to the field of optical technology, holding a total of 4 patents. His work primarily focuses on processes that enhance the efficiency and effectiveness of optical absorbers used in various applications.
Latest Patents
One of Rajesh Kanuri's latest patents is titled "Low temperature process for depositing a high extinction coefficient non-peeling optical absorber for a scanning laser surface anneal of implanted dopants." This innovative process utilizes a plasma enhanced physical vapor deposition technique to deposit an amorphous carbon layer on an ion-implanted wafer. The method is designed for dynamic surface annealing of the wafer using an intense line beam of a laser wavelength. The deposition occurs at a wafer temperature below the dopant clustering threshold temperature. The process involves introducing the wafer into a chamber with a carbon-containing target and supplying a carrier gas. Additionally, it includes generating a wafer bias voltage and applying target source power to the carbon-containing target to achieve ion bombardment. The wafer bias voltage is carefully set to ensure that the deposited amorphous carbon layer has the desired extinction coefficient at the laser wavelength.
Career Highlights
Rajesh Kanuri is currently employed at Applied Materials, Inc., where he continues to innovate and develop new technologies. His expertise in optical materials and processes has positioned him as a key contributor in his field.
Collaborations
Throughout his career, Rajesh has collaborated with notable professionals, including Christopher Dennis Bencher and Vijay Parihar. These collaborations have further enhanced his research and development efforts.
Conclusion
Rajesh Kanuri's contributions to optical technology through his innovative patents demonstrate his commitment to advancing the field. His work at Applied Materials, Inc. continues to influence the development of efficient optical absorbers.