Location History:
- Palo Alto, CA (US) (2006)
- Los Altos, CA (US) (2007 - 2016)
Company Filing History:
4 out of 1,787 
3 out of 641 
Years Active: 2006-2016
Title: Rainer Schierle: Innovator in Optical Inspection Systems
Introduction
Rainer Schierle is a prominent inventor based in Los Altos, California. He has made significant contributions to the field of optical inspection systems, particularly in the semiconductor industry. With a total of 7 patents to his name, Schierle's work has advanced the technology used for inspecting dual-sided specimens.
Latest Patents
One of Schierle's latest patents is for a grazing and normal incidence interferometer having a common reference surface. This innovative system is designed for inspecting specimens such as semiconductor wafers. It provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface. The system employs two channels and two reflective surfaces, combining the wavefronts using a second diffraction grating and passing them to a camera system with a desired aspect ratio. Additionally, the system includes a damping arrangement that filters unwanted acoustic and seismic vibrations. It features an optics arrangement that scans a first portion of the specimen and a translation or rotation arrangement for positioning the specimen for further scanning. The system also incorporates means for stitching scans together, allowing for smaller and less expensive optical elements.
Career Highlights
Throughout his career, Rainer Schierle has worked with notable companies in the industry, including Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His experience in these organizations has contributed to his expertise in optical inspection technologies.
Collaborations
Some of Schierle's coworkers include Daniel Ivanov Kavaldjiev and Amin Samsavar. Their collaboration has likely played a role in the development of innovative solutions in the field.
Conclusion
Rainer Schierle's contributions to optical inspection systems have made a significant impact on the semiconductor industry. His innovative patents and career achievements highlight his role as a leading inventor in this specialized field.