The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2009
Filed:
Jul. 27, 2006
Amin Samsavar, Saratoga, CA (US);
John M. Schmidt, Oakland, CA (US);
Rainer Schierle, Los Altos, CA (US);
Gregory S. Horner, Santa Clara, CA (US);
Thomas G. Miller, Sunnyvale, CA (US);
Zhiwei Xu, Sunnyvale, CA (US);
Xiaofeng HU, Richardson, TX (US);
Jianou Shi, Milpitas, CA (US);
Sergio Edelstein, Los Gatos, CA (US);
Amin Samsavar, Saratoga, CA (US);
John M. Schmidt, Oakland, CA (US);
Rainer Schierle, Los Altos, CA (US);
Gregory S. Horner, Santa Clara, CA (US);
Thomas G. Miller, Sunnyvale, CA (US);
Zhiwei Xu, Sunnyvale, CA (US);
Xiaofeng Hu, Richardson, TX (US);
Jianou Shi, Milpitas, CA (US);
Sergio Edelstein, Los Gatos, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
Systems and methods for determining a property of a specimen are provided. The specimen may be a product wafer. The method may include biasing a focused spot on the specimen. The method may also include measuring a parameter of a measurement spot on the specimen. The measurement spot may overlap the focused spot. In addition, the method may include determining the property of the specimen from the measured parameter. Systems and methods for varying the performance of a corona source are also provided. The method may include altering a property of the environment within the corona source. The property may include, but is not limited to, temperature, pressure, humidity, and/or partial pressure of a gas within the corona source.