Qing Hua Zhong

Title: Innovations by Qing Hua Zhong

Introduction

Qing Hua Zhong is a notable inventor based in Singapore, recognized for his contributions to the field of integrated circuit technology. He holds 2 patents that showcase his innovative approaches to semiconductor manufacturing.

Latest Patents

One of his latest patents is titled "Method to form shallow trench isolation structures." This invention describes a method for creating shallow trench isolation trenches in a silicon substrate of an integrated circuit device. The process involves providing a silicon substrate, depositing a buffer layer, and applying an etching endpoint layer. A silicon layer is then deposited, followed by a photoresist layer that is developed to remove sections where trenches are planned. The silicon layer, etching endpoint layer, and buffer layer are etched to expose the silicon substrate, ultimately forming the trenches necessary for the integrated circuit device.

Another significant patent is "Use of polymer spacers for the fabrication of shallow trench isolation." This method focuses on forming insulator-filled shallow trench isolation regions with rounded corners. The process utilizes a polymer-coated opening in an insulator layer as a mask to define the shallow trench region in silicon. After the shallow trench formation, the polymer spacers are removed, revealing unetched semiconductor regions that were protected during the etching process. The sharp corners at the intersection of the shallow trench and unetched semiconductor are then rounded through thermal oxidation.

Career Highlights

Qing Hua Zhong is currently employed at Chartered Semiconductor Manufacturing Ltd, where he applies his expertise in semiconductor technology. His work has significantly impacted the efficiency and effectiveness of integrated circuit manufacturing processes.

Collaborations

Throughout his career, Qing Hua Zhong has collaborated with talented individuals such as Mei Sheng Zhou and Bo Yu. These collaborations have fostered an environment of innovation and creativity in their projects.

Conclusion

Qing Hua Zhong's contributions to semiconductor technology through his patents demonstrate his commitment to advancing the field. His innovative methods for shallow trench isolation are vital for the development of integrated circuits, showcasing his role as a leading inventor in this domain.