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Years Active: 2021-2024
Title: The Innovative Contributions of Po-Hsun Tseng
Introduction
Po-Hsun Tseng is a notable inventor based in New Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of four patents. His work focuses on enhancing the efficiency and effectiveness of etch process chambers used in the production of semiconductors.
Latest Patents
Among his latest patents is the "Chamber wall polymer protection system and method." This invention involves positioning oscillators at a predetermined distance from the outer wall of an etch process chamber, which are coupled to a microwave generator. The inner wall of the chamber vibrates to dislodge particulates such as polymers that adhere during the etching process. A gas flows into the cavity defined by the inner wall to collect these displaced particulates, which are then pumped out to clean the chamber. The system is controlled by a controller that identifies the polymer recipe used and selects an appropriate oscillation program. Another significant patent is the "Wafer container and method for holding wafer," which features a shelf capable of holding at least one wafer, with openings that allow for exposure and access.
Career Highlights
Po-Hsun Tseng has worked with prominent companies in the technology sector, including Taiwan Semiconductor Manufacturing Company Ltd. and IBM. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor technology.
Collaborations
Throughout his career, Tseng has collaborated with talented individuals such as Yan-Hong Liu and David Shao Chung Chen. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Po-Hsun Tseng's contributions to the field of semiconductor manufacturing through his patents and collaborations highlight his innovative spirit and dedication to advancing technology. His work continues to influence the industry and pave the way for future developments.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.