International Business Machines Corporation

Taiwan Semiconductor Manufacturing Comp. Ltd.

Po-Hsun Tseng

Yan-Hong Liu

Wei-Te Chiang

David Shao Chung Chen

Hung-Wen Chen

Hsiao-Yung Chen

Der-Joung Wang

Molly Chang

Kuo-Liang Chou

Louis Huang

En-Shuo Hsu

Wen-Han Tan

Lilian Lai

In an etch process chamber, oscillators are positioned a predetermined distance away from an outer wall and coupled to a microwave generator. An inner wall of the process chamber on which particulates such as polymers adhere from the etch process is vibrated via operations of the oscillators. A gas flows into the cavity defined by the inner wall to collect the displaced particulates, which is then pumped out of the cavity to clean the process chamber. A controller identifies the polymer recipe used during the etch process and selects an oscillation program from memory. A microwave generator, controlled by the controller, is directed to generate microwaves at preselected frequencies determined from the program. The microwave frequencies are communicated to the oscillators, which then vibrate the inner wall at such received frequencies.

Chamber wall polymer protection system and method

A wafer container includes at least one shelf and a frame. The shelf is capable of holding at least one wafer, and has at least one opening therein. The opening is at least partially exposed by the wafer when the wafer is hold by the shelf. The frame carries the shelf and allows access to the shelf.

Wafer container and method for holding wafer

A picture is obtained. The picture is intended to be compressed in a video stream. The picture includes pixel data that depicts a scene. A subject in the pixel data that depicts the scene is identified. The identification is based on the pixel data included in the picture. A plurality of object data is generated. The generated object data is related to the subject. The generation is based on the identification of the subject. An intended compression format of the pictured to be compressed in the video stream is determined. A pixel operation on the picture is performed. The performance is based on the determination of the intended compression format and before compression of the picture. The generated plurality of object data is related with the picture after compression of the picture.

Object manipulation video conference compression

In an approach for smart collaboration, a plurality of images are received. Each image of the plurality of images is from a different device of a plurality of devices. The plurality of images are combined into a single combined image. The combined image is transferred to the plurality of devices.

Smart collaboration across multiple locations

Growing community of inventors

Taipei, Taiwan

Po-Hsun Tseng