This inventor holds 2 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2005-2019.
Location History:
- Hsin-chu, TW (2005)
- Zhudong Township, Hsinchu County, TW (2019)
Company Filing History:
Years Active: 2005-2019
Title: Ping-Ling Fan: Innovator in Semiconductor Technology
Introduction
Ping-Ling Fan is a notable inventor based in Zhudong, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on improving the efficiency and safety of semiconductor fabrication processes.
Latest Patents
One of his latest patents is related to mechanisms for etching apparatus and etching-detection methods. This patent describes embodiments of mechanisms of an etching apparatus that includes a processing chamber and a gas distribution plate with multiple exhaust openings. The apparatus is designed to spurt gas into the processing chamber during semiconductor processes, enhancing the etching efficiency.
Another significant patent by Fan is the gap gauge, which is an apparatus and method aimed at preventing damage to a chamber wall by a baffle plate during semiconductor fabrication operations. This invention includes an electrostatic chuck and a gauge for measuring the gap between the baffle plate and the chamber wall, ensuring the integrity of the chamber during operations such as wet cleaning.
Career Highlights
Ping-Ling Fan is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has contributed to advancements in semiconductor fabrication technologies.
Collaborations
Throughout his career, Fan has collaborated with notable colleagues, including Te-Hsiang Liu and Chi-Wei Chang. Their combined expertise has furthered the development of cutting-edge technologies in the semiconductor field.
Conclusion
Ping-Ling Fan's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His work continues to impact the efficiency and safety of semiconductor fabrication processes.