Ping-Ho Lo

Introduction

Ping-Ho Lo is a prominent inventor based in Hsinchu, Taiwan, with a remarkable contribution to the field of semiconductor technology. He has been awarded two patents that focus on methods of fabricating shallow trench isolations, significantly enhancing the performance and reliability of semiconductor devices.

Latest Patents

His latest patents include two innovative methods aimed at addressing critical challenges in the manufacturing process of shallow trench isolation. The first patent, titled "Method of Fabricating Shallow Trench Isolation," describes a detailed process where a pad oxide layer and a polysilicon layer are formed on a silicon substrate. These layers are subsequently etched, and the exposed substrate undergoes oxidation to create an oxide layer. The precursor layers are then removed, resulting in oxide spacers on the side walls of the shallow trench, effectively eliminating the kink effect.

The second patent, "Method of Fabricating Kink-Effect-Free Shallow Trench Isolations," outlines a similar yet refined approach. The process begins with the deposition of silicon oxide and polysilicon layers sequentially on a substrate. After shallow trenches are created, thermal oxidation grows a passivation oxide layer on the exposed silicon. A dielectric layer fills the shallow trench and is then polished down to the polysilicon layer for endpoint detection. This process ensures that the shallow trench is crafted perfectly to avoid the kink effect during operation.

Career Highlights

Ping-Ho Lo has made significant strides in the semiconductor industry as an inventor for United Microelectronics Corporation (UMC). His innovative methodologies have contributed to advancements in fabricating high-performance semiconductor devices, streamlining production processes and enhancing product reliability.

Collaborations

Throughout his career, Ping-Ho Lo has collaborated with notable professionals such as Lu-Min Liu and Hsi-Chieh Chen. Their teamwork has facilitated the successful development and implementation of cutting-edge technologies in the semiconductor sector.

Conclusion

Ping-Ho Lo's innovative approach to shallow trench isolation fabrication demonstrates his commitment to advancing semiconductor technology. With multiple patents to his name, he continues to influence the industry and contribute valuable technologies that can improve device performance and manufacturing efficiency. His work exemplifies the vital role that inventive minds play in the ongoing evolution of technology.