This inventor holds 1 USPTO granted patent. Top assignee: Novellus Systems Incorporated. Active years: 2006.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2006
Title: The Innovative Contributions of Pin Sheng Sun
Introduction
Pin Sheng Sun is a notable inventor based in San Jose, California. He has made significant contributions to the field of chemical vapor deposition processes, particularly in the area of semiconductor manufacturing. His innovative work has led to advancements that enhance the efficiency and effectiveness of filling high aspect ratio structures.
Latest Patents
Pin Sheng Sun holds a patent for a "Hydrogen-based phosphosilicate glass process for gap fill of high aspect ratio structures." This patent addresses the challenges associated with filling narrow width gaps, typically 1.5 microns or less, with a focus on reducing the incidence of voids or weak spots. The process utilizes hydrogen and a phosphorus dopant precursor as process gases in a reactive mixture within a plasma-containing CVD reactor. Additionally, the process gas includes dielectric forming precursor molecules such as silicon and oxygen-containing compounds. This innovative approach has the potential to significantly improve the reliability of semiconductor devices.
Career Highlights
Pin Sheng Sun is currently employed at Novellus Systems Incorporated, a company known for its cutting-edge technologies in the semiconductor industry. His work at Novellus has allowed him to apply his expertise in chemical vapor deposition to real-world applications, contributing to the advancement of semiconductor manufacturing processes.
Collaborations
Throughout his career, Pin Sheng Sun has collaborated with esteemed colleagues, including George D Papasouliotis and Md Sazzadur Rahman. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking technologies in the field.
Conclusion
Pin Sheng Sun's contributions to the field of chemical vapor deposition and semiconductor manufacturing are noteworthy. His innovative patent and work at Novellus Systems Incorporated highlight his role as a key player in advancing technology in this critical industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile