Location History:
- Sunnyvale, CA (US) (2006)
- Fremont, CA (US) (2009)
Company Filing History:
Years Active: 2006-2009
Title: Phong Le: Innovator in Deposition Process Abatement
Introduction
Phong Le is a notable inventor based in Fremont, CA (US). He has made significant contributions to the field of deposition processes, particularly in the abatement of by-products generated during these processes. With a total of 2 patents to his name, his work is recognized for its innovative approaches to environmental safety and efficiency.
Latest Patents
Phong Le's latest patents include an "Apparatus for abatement of by-products generated from deposition processes and cleaning of deposition chambers" and a "Method and apparatus for abating fluorine from by-products generated during cleaning of a processing chamber." These inventions focus on efficiently performing abatement by directly injecting hydrogen in line with a foreline exiting the processing chamber. A tube that is highly resistant to oxidation and corrosive gases, even at high temperatures, is connected in line with the foreline as part of the exhaust line of the processing chamber. Additionally, a cooling jacket may be provided for cooling the tube, as the reaction between fluorine and hydrogen is exothermic. A pressure monitoring arrangement is also employed to ensure that the pressure within the hydrogen line, which feeds the injection of hydrogen into the tube, does not exceed a predetermined pressure value.
Career Highlights
Phong Le is currently employed at Applied Materials, Inc., where he continues to develop innovative solutions in his field. His work has contributed to advancements in the semiconductor industry, particularly in improving the safety and efficiency of deposition processes.
Collaborations
Phong has collaborated with notable coworkers such as Himanshu Pokharna and Srinivas D Nemani, further enhancing the innovative environment at Applied Materials, Inc.
Conclusion
Phong Le's contributions to the field of deposition process abatement highlight his commitment to innovation and environmental safety. His patents reflect a deep understanding of the challenges faced in the industry and offer practical solutions to address them.