Applied Materials, Inc.

Phong Le

Srinivas D Nemani

Himanshu Pokharna

Method and apparatus for abating Ffrom by-products generated during cleaning of a processing chamber. Fabatement is efficiently performed by directly injecting Hin line with a foreline exiting the processing chamber. A tube which is highly resistant to oxidation and corrosive gases, even at high temperature, is connected in line with the foreline as part of the exhaust line of the processing chamber. A cooling jacket may be provided for cooling the tube, since the reaction between Fand His exothermic. A pressure monitoring arrangement may also be employed to insure that pressure within a hydrogen line, that feeds the injection of Hinto the tube, does not exceed a predetermined pressure value.

Apparatus for abatement of by-products generated from deposition processes and cleaning of deposition chambers

Method and apparatus for abating Ffrom byproducts generated during cleaning of a processing chamber. Fabatement is efficiently performed by directly injecting Hin line with a foreline exiting the processing chamber. A tube which is highly resistant to oxidation and corrosive gases, even at high temperature, is connected in line with the foreline as part of the exhaust line of the processing chamber. A cooling jacket may be provided for cooling the tube, since the reaction between Fand His exothermic. A pressure monitoring arrangement may also be employed to insure that pressure within a hydrogen line, that feeds the injection of Hinto the tube, does not exceed a predetermined pressure value.

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Fremont, CA, United States of America

Phong Le