Company Filing History:
Years Active: 2017-2018
Title: Innovator Philipp Jaschinsky: Pioneering Advanced Process Control in Photolithography
Introduction
Philipp Jaschinsky is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of advanced process control, particularly in photolithography. With a total of 2 patents, his work focuses on minimizing defects and improving the precision of manufacturing processes.
Latest Patents
Jaschinsky's latest patents include innovative methods for advanced process control. One patent, titled "Advanced process control methods for process-aware dimension targeting," discloses techniques for performing advanced process control (APC) on wafers during photolithography or etch processes. This method involves measuring a parameter on a target feature and using an adjusted parameter value to minimize dimension variations across patterns.
Another significant patent is focused on "Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity." This invention provides methods and systems to reduce defectivity in immersion photolithography by utilizing a photomask that includes both a main functional pattern and a sub-resolution fill pattern. This approach ensures that the fill pattern does not adversely affect the imaging of the main functional pattern.
Career Highlights
Philipp Jaschinsky is currently employed at GlobalFoundries Inc., where he continues to develop and refine his innovative techniques in semiconductor manufacturing. His expertise in advanced process control has positioned him as a key player in the industry.
Collaborations
Throughout his career, Jaschinsky has collaborated with notable colleagues, including Frank Kahlenberg and Sirko Kramp. These partnerships have contributed to the advancement of technologies in the field of photolithography.
Conclusion
Philipp Jaschinsky's contributions to advanced process control and photolithography are noteworthy. His innovative patents and work at GlobalFoundries Inc. highlight his commitment to improving manufacturing processes in the semiconductor industry.
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