Philip R Rigg

Title: **Philip R Rigg: Innovator in Optical Detection Systems**

Introduction

Philip R Rigg is a distinguished inventor based in Saratoga, California, with a significant portfolio that includes three patents. His work primarily focuses on developing advanced optical systems for precision measurement and surface inspection, which have substantial implications in various technological fields.

Latest Patents

Rigg's latest patents showcase his innovative designs in optical detection systems. One notable patent is the **Optical Wafer Positioning System**. This invention features a position detector that has a sensitivity characteristic graded along a direction transverse to the surface. It utilizes an incident beam of light that impinges obliquely upon the surface, effectively determining the height of the surface. The position detector receives the specularly reflected light and produces multiple electrical signals. A mechanical window with an aperture is placed in front of the detector to create a train of signals that relate to both the position of the reflected beam and the intensity variations, ultimately enabling accurate surface height detection.

Another significant patent by Rigg involves a **Detection System for Precision Measurements and High Resolution**. This invention improves imaging techniques for high-aspect-ratio structures like contact holes by employing two signal detection subsystems. Each subsystem is optimized for imaging the top and base of submicrometer structures. The ability to combine these signals in real-time allows for high-precision measurements without extrapolation, offering inherent linearity and resolution comparable to electron-beam technology.

Career Highlights

Throughout his career, Philip R Rigg has contributed to renowned companies, including Tencor Instruments and Metrologix, Inc. His work has played a crucial role in enhancing technology within the optical detection and measurement sectors. His innovations have served vital functions in wafer inspection and semiconductor manufacturing processes, demonstrating his impact on the industry.

Collaborations

Rigg has collaborated with notable professionals in the field, including Mehrdad Nikoonahad and Keith B Wells. These partnerships have enriched his work, enabling the exchange of knowledge and fostering the development of cutting-edge technologies.

Conclusion

Philip R Rigg’s contributions to the realm of optical detection systems reflect his commitment to innovation in technology. His patents serve as testaments to his expertise and dedication to advancing precision measurement techniques. As technology continues to evolve, Rigg's inventions will undoubtedly remain influential in shaping future developments within the industry.