Company Filing History:
Years Active: 2007
Title: Peter Cornelis Görts: Innovator in Multilayer Systems
Introduction
Peter Cornelis Görts is a notable inventor based in Utrecht, Netherlands. He has made significant contributions to the field of multilayer systems, particularly in enhancing their performance and longevity. His innovative work has implications for various high-tech applications, especially in semiconductor lithography.
Latest Patents
Peter Cornelis Görts holds a patent for a multilayer system with a protective layer system and its production method. This multilayer system addresses the challenges of contamination and oxidation that can occur during storage and operation in extreme ultraviolet (EUV) environments. The invention ensures a long life with consistently high reflectivity, making it particularly suitable for use in semiconductor lithography. The multilayer systems feature protective layers made of iridium and are produced through direct, ion-beam-supported growth. This method not only enhances reflectivity but also allows for cleaning without loss of performance.
Career Highlights
Peter is currently associated with Carl Zeiss SMT AG, a company renowned for its advancements in optical systems and technologies. His work at the company has positioned him as a key player in the development of innovative multilayer systems that meet the demands of modern technology.
Collaborations
Peter has collaborated with esteemed colleagues such as Frederik Bijkerk and Eric Louis. Their combined expertise has contributed to the successful development of advanced multilayer systems.
Conclusion
Peter Cornelis Görts is a pioneering inventor whose work in multilayer systems has significantly impacted the field of semiconductor lithography. His innovative approaches ensure high performance and durability in challenging environments.