Company Filing History:
Years Active: 1997-2001
Title: Innovations of Peter A. Rosenthal
Introduction
Peter A. Rosenthal is a notable inventor based in West Simsbury, Connecticut. He has made significant contributions to the field of semiconductor fabrication, holding a total of four patents. His work focuses on improving processes and systems that enhance the efficiency and reliability of semiconductor manufacturing.
Latest Patents
Among his latest patents is the "Method and apparatus for fault detection and control." This invention introduces a fault detection and classification system for wafer etching, tool cleaning, and other fabrication processes. It utilizes exhaust gas composition data from a Fourier transform infrared spectrometer, along with machine-state and other process-state data, to initiate process control based on fault classification. Another significant patent is the "Cell control method and apparatus," which implements sensor-driven run-to-run process control for semiconductor wafer fabrication. This invention integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication cluster tool, enhancing the overall control and efficiency of the fabrication process.
Career Highlights
Peter A. Rosenthal has built a successful career at On-line Technologies, Inc., where he has been instrumental in developing innovative solutions for the semiconductor industry. His expertise in process control and fault detection has positioned him as a key figure in advancing semiconductor manufacturing technologies.
Collaborations
Throughout his career, Peter has collaborated with notable colleagues, including Peter R. Solomon and Anthony S. Bonanno. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Peter A. Rosenthal's contributions to semiconductor fabrication through his innovative patents and collaborative efforts have significantly impacted the industry. His work continues to pave the way for advancements in manufacturing processes, ensuring greater efficiency and reliability in semiconductor production.