The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2000
Filed:
Sep. 17, 1998
Applicant:
Inventors:
Peter A Rosenthal, West Simsbury, CT (US);
Peter R Solomon, West Hartford, CT (US);
Anthony S Bonanno, Windsor, CT (US);
William J Eikleberry, Coventry, CT (US);
Assignee:
On-Line Technologies, Inc., East Hartford, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F / ;
U.S. Cl.
CPC ...
700121 ; 700101 ; 700102 ; 700111 ; 414217 ; 414227 ; 25033908 ; 25033911 ; 25033927 ; 438220 ; 438231 ; 438232 ;
Abstract
An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication cluster tool. Cell controller software integrates an adaptive run-to-run controller, process tool recipe upload and download through a SECS port, sensor control, data archiving, and a graphical user interface.