Peng Shen

Title: The Innovations of Peng Shen

Introduction: Peng Shen is a notable inventor based in Taoyuan, Taiwan. He has made significant contributions to the field of semiconductor manufacturing. His work focuses on improving processes that enhance the efficiency and yield of production.

Latest Patents: Peng Shen holds 1 patent for a "Wet bench process with in-situ pre-treatment operation." This patent describes a wet bench processing method that includes an in-situ pre-treatment prior to performing the first set of wet bench operations. The pre-treatment may consist of a pre-clean operation and/or a pre-heat operation. This innovative approach can be performed in existing ONB tanks without the need for additional tanks. The pre-clean operation effectively removes particles from a batch of wafers, thereby reducing cross-contamination and defect issues. This improvement leads to a higher yield rate in the wet bench process. Additionally, the pre-heat operation stabilizes the temperature in the CHB tank, which is crucial for maintaining consistent etch rates.

Career Highlights: Peng Shen is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His role involves developing and refining processes that are essential for semiconductor fabrication. His expertise in wet bench processing has positioned him as a valuable asset in the industry.

Collaborations: Some of his coworkers include Chung-Wei Chang and Bo-Wei Chou. Their collaborative efforts contribute to the advancement of semiconductor technologies.

Conclusion: Peng Shen's innovative work in wet bench processing exemplifies the importance of continuous improvement in semiconductor manufacturing. His contributions not only enhance production efficiency but also ensure higher quality outcomes in the industry.