Campbell, CA, United States of America

Pei Cheh Chen


Average Co-Inventor Count = 5.1

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2007-2010

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3 patents (USPTO):

Title: Pei Cheh Chen: Innovator in Ion Milling Technology

Introduction

Pei Cheh Chen is a notable inventor based in Campbell, California, recognized for her contributions to the field of wafer manufacturing. With a total of three patents to her name, she has made significant advancements in ion milling processes, which are crucial for the semiconductor industry.

Latest Patents

One of her latest patents is titled "Method and apparatus for increasing uniformity in ion mill process." This invention focuses on enhancing etch depth uniformity during the ion milling process by strategically loading designated regions of a production pallet with carriers containing wafers. These regions are predetermined to exhibit similar and preferred depths of etching, while non-designated regions are filled with dummy carriers. This innovative approach aims to improve the overall efficiency of wafer manufacturing.

Another significant patent is "Direct cooling pallet assembly for temperature stability for deep ion mill etch process." This invention involves a frame component of a pallet assembly designed to maintain temperature stability during the etching process. The frame includes multiple arms for retaining carrier components and features a spring mechanism that applies pressure to the carrier, ensuring optimal performance during ion milling.

Career Highlights

Pei Cheh Chen has worked with prominent companies in the technology sector, including Hitachi Global Storage Technologies in both the Netherlands and Amsterdam. Her experience in these organizations has allowed her to develop and refine her innovative ideas in the field of ion milling.

Collaborations

Throughout her career, Pei has collaborated with talented individuals such as Yongjian Sun and Jorge Goitia. These partnerships have contributed to her success and the advancement of her inventions.

Conclusion

Pei Cheh Chen's work in ion milling technology showcases her innovative spirit and dedication to improving wafer manufacturing processes. Her patents reflect her expertise and commitment to advancing the semiconductor industry.

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