Pawitter J S Mangat

Title: Inventor Spotlight: Pawitter J S Mangat from Gilbert, AZ

Introduction

Pawitter J S Mangat is an accomplished inventor based in Gilbert, Arizona, who has made significant contributions to the field of semiconductor technology. With three patents to his name, Mangat is recognized for his innovative approaches to enhancing the efficiency and performance of extreme ultraviolet (EUV) radiation applications.

Latest Patents

Mangat's latest work includes the development of a reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and a method for making the same. This EUV mask features an opening that helps to attenuate and phase shift extreme ultraviolet radiation through a subtractive method. Additionally, the incorporation of an etch stop layer between the lower and upper multilayer reflective stacks ensures an accurate depth of the opening, while an absorber layer within the opening reduces reflection in dark regions.

Another notable patent by Mangat involves the formation of a rim phase-shifting mask that enhances semiconductor device manufacturing. This patent outlines a method of patterning a resist layer using a rim phase-shifting mask, involving multilayer or single patterning layers to create various phase-shifting and opaque regions. The inventive method allows for improved contrast by phase-shifting light traveling through specific regions, leading to enhanced accuracy in semiconductor device production.

Career Highlights

Mangat has built an impressive resume through his experience working with leading organizations. He has been associated with Freescale Semiconductor, where he contributed to advancing semiconductor technologies. Additionally, his academic involvement at the University of California has furthered his research and innovation in the field.

Collaborations

Throughout his career, Mangat has collaborated with esteemed colleagues Scott Daniel Hector and William Man-Wai Tong. These partnerships have fostered a creative environment that encourages groundbreaking developments in semiconductor technologies.

Conclusion

Pawitter J S Mangat continues to inspire the innovation landscape with his patents and contributions to semiconductor advancements. His commitment to improving technologies through innovative methods underscores the importance of research and development in achieving continued progress in this vital industry. With each patent, Mangat exemplifies the spirit of invention and the potential to shape the future of technology.