Paul D Jackson

Title: The Innovative Mind of Paul D Jackson

Introduction

Paul D Jackson, an inventive spirit from Scottsdale, AZ, has made significant contributions to the field of chemical-mechanical polishing (CMP) with a total of three patents to his name. His innovative ideas have paved the way for advancements in the polishing apparatus industry, showcasing his expertise and impact on modern technology.

Latest Patents

One of his notable inventions is a pneumatic polishing head for CMP apparatus. This innovative polishing head features a carrier plate with concentric, integral, cylindrical walls. It includes an annular piston that fits within the outer cylindrical wall and a second piston fitting within the inner wall, creating isolated chambers for optimized performance. Pneumatic fittings supply air or vacuum to these chambers, ensuring precise function. The design integrates a thicker bottom plate in the center of the piston, covered with a wafer adhering layer, and employs spiral grooves for effective slurry circulation during polishing, elevating the efficiency of the CMP process.

Additionally, Jackson has developed a conditioner for a polishing pad and its method. This invention outlines an axially rotating circular polishing pad conditioned by a rotating end effector equipped with an abrasion disc. The end effector's movement along the radius of the polishing pad surface is designed to vary in velocity to maintain the desired contact force, thus enhancing the effectiveness of the conditioning process.

Career Highlights

Throughout his career, Paul D Jackson has made a significant mark while working with prominent companies such as Westech Systems, Inc. and Integrated Process Equipment Corporation. His innovative contributions have led to advances in CMP technology and have been instrumental in improving polishing techniques.

Collaborations

Jackson’s journey in the world of inventions has included collaboration with notable colleagues such as Stephen C Schultz and James E Sanford. Together, they share insights and expertise, which have further refined the innovations originating from their collective experience in the industry.

Conclusion

Paul D Jackson stands as a testament to the power of innovation and the importance of engineering advancements in the CMP industry. With his patented inventions and collaborative efforts, he has significantly influenced polishing technology, fostering improvements that benefit the field. His work exemplifies the relentless pursuit of progress and the impact that dedicated inventors have on shaping modern technology.