Company Filing History:
Years Active: 2001-2004
Title: The Innovative Mind of Paul Andrew Spence
Introduction
Paul Andrew Spence, an accomplished inventor based in Pleasanton, CA, has contributed significantly to the field of advanced technology with four patents to his name. His innovations focus on improving the functionality and efficiency of systems used in the production of extreme ultraviolet light and related technologies.
Latest Patents
Among his latest patents, the "Compliant Layer Chucking Surface" introduces a cutting-edge method and apparatus that features a thin layer of compliant material on a chuck's surface. This innovation is designed to minimize the deformation caused by entrapped particles on components like masks or wafers during clamping. The compliant layer, made from either metal or polymer, has a strategic design that disrupts the continuous surface to lower the chances of particle entrapment.
Another notable patent is the "Electrode Configuration for Extreme-UV Electrical Discharge Source." This patent addresses the challenges of debris generation in electric capillary discharge sources by developing an electrode shape that maintains a uniform electric field strength. This uniformity is crucial for generating extreme ultraviolet and soft x-ray light while minimizing sputtering and subsequent debris production. The design includes both convex and concave regions optimized for effective operation.
Career Highlights
Paul Andrew Spence serves as a pivotal member of EUV LLC, a company renowned for its advancements in technologies related to extreme ultraviolet light. His work there has not only contributed to his personal patent portfolio but has also played an integral role in the company's innovative projects.
Collaborations
Throughout his career, Paul has collaborated with esteemed colleagues such as Kenneth L. Blaedel and Samuel L. Thompson. These partnerships have enriched the innovation process, enabling the development of state-of-the-art solutions in their respective fields.
Conclusion
Paul Andrew Spence exemplifies the spirit of innovation through his patents and contributions to advanced technologies. His work at EUV LLC and his collaborations with other innovators reflect a commitment to enhancing technological capabilities, paving the way for future advancements in the industry.