Trecate, Italy

Paride Corbellini


Average Co-Inventor Count = 4.4

ph-index = 2

Forward Citations = 19(Granted Patents)


Company Filing History:


Years Active: 2005-2006

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2 patents (USPTO):Explore Patents

Title: Paride Corbellini: Innovator in Semiconductor Wafer Polishing Technology

Introduction

Paride Corbellini is a notable inventor based in Trecate, Italy. He has made significant contributions to the field of semiconductor technology, particularly in the area of wafer polishing. With a total of 2 patents to his name, Corbellini's work has advanced the methods used in the semiconductor manufacturing process.

Latest Patents

Corbellini's latest patents include a "Semiconductor wafer, polishing apparatus and method." This innovative apparatus is designed for polishing semiconductor wafers and comprises several key components, including a base, a turntable, a polishing pad, and a drive mechanism for the rotation of a polishing head. The polishing head is engineered to hold at least one wafer, ensuring that the front surface of the wafer engages effectively with the polishing pad. A unique spherical bearing assembly allows the polishing head to pivot, maintaining a parallel relationship between the wafer and the polishing pad. This design ensures uniform polishing pressure across the wafer's surface, particularly near its edges. Additionally, he has developed a method of polishing wafers that optimizes the vacuum pressure used during the process, enhancing the flatness and parallelism of the polished surfaces.

Career Highlights

Corbellini is currently employed at Memc Electronic Materials, Inc., where he continues to innovate in the semiconductor field. His work has been instrumental in improving the efficiency and effectiveness of wafer polishing techniques, which are critical in semiconductor manufacturing.

Collaborations

Throughout his career, Corbellini has collaborated with notable colleagues, including Ezio Bovio and Giovanni Negri. These partnerships have contributed to the advancement of technology in the semiconductor industry.

Conclusion

Paride Corbellini's contributions to semiconductor wafer polishing technology highlight his role as a key innovator in the field. His patents and ongoing work at Memc Electronic Materials, Inc. demonstrate his commitment to advancing semiconductor manufacturing processes.

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