Palaniappan Chidambaram

Title: Palaniappan Chidambaram: Innovator in Amorphous Indium Tin Oxide Technology

Introduction

Palaniappan Chidambaram is a notable inventor based in Singapore, SG. He has made significant contributions to the field of materials science, particularly in the development of methods and apparatus for depositing amorphous indium tin oxide films. With a total of three patents to his name, Chidambaram's work has implications for various applications in electronics and optoelectronics.

Latest Patents

Chidambaram's latest patents include innovative techniques for processing substrates in a process chamber. One of his notable inventions is a method that involves positioning a substrate on a substrate support within a process volume, opposite a sputter target made of indium tin oxide. This method includes flowing a plasma-forming gas into the process volume and sputtering the indium tin oxide onto the substrate while applying AC bias. Another significant patent is related to a sputter target designed for a physical vapor deposition chamber, which enhances the efficiency and quality of the deposition process.

Career Highlights

Chidambaram is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to collaborate with other talented professionals in the industry, further advancing the technology related to indium tin oxide.

Collaborations

Some of his notable coworkers include Siew Kit Hoi and Jay Min Soh. Their collaborative efforts contribute to the innovative environment at Applied Materials, fostering advancements in technology and research.

Conclusion

Palaniappan Chidambaram's contributions to the field of materials science, particularly through his patents on amorphous indium tin oxide technology, highlight his role as a significant inventor. His work continues to influence advancements in electronic materials and processes.