Owen Fong

Title: Owen Fong: Innovator in Sputtering Technology

Introduction

Owen Fong is a notable inventor based in San Jose, California, recognized for his contributions to sputtering technology. With two patents to his name, he has made significant advancements in flexible processing systems for semiconductor manufacturing.

Latest Patents

Owen Fong's latest patents include the "Interchangeable Sputter Gun Head" and "Sputtering and Aligning Multiple Layers Having Different Boundaries." The interchangeable sputter gun head provides flexible processing capabilities in both high productivity combinatorial and full wafer modes. This apparatus allows for interchangeable functionality, including deposition with different sizes of targets, plasma treatment, ion beam treatment, and in-situ metrology. The design of the functional modules enables easy interchangeability with minimal effort and reduced system downtime. His second patent focuses on methods and systems for forming discreet multilayered structures. This involves in situ deposition of multiple layers at various site isolation regions on the same substrate, enhancing the efficiency of combinatorial processing.

Career Highlights

Owen Fong is currently employed at Intermolecular, Inc., where he continues to innovate in the field of semiconductor technology. His work has contributed to the development of advanced sputtering techniques that improve manufacturing processes.

Collaborations

Owen collaborates with talented individuals such as Sean Barstow and Timothy Joseph Franklin, who share his passion for innovation in technology.

Conclusion

Owen Fong's contributions to sputtering technology and his innovative patents reflect his commitment to advancing semiconductor manufacturing processes. His work continues to influence the industry positively.