One-Moon Chang

Introduction

One-Moon Chang is a distinguished inventor based in Yongin-si, South Korea. With a total of three patents to his name, he has made significant contributions to the field of chemical mechanical polishing (CMP) technology. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One-Moon Chang's latest patents include innovative apparatuses designed for chemical mechanical polishing. One of his notable inventions is a **Chemical Mechanical Polishing Apparatus** that features a platen with a first region to support a wafer and a second region positioned outside the first. This apparatus incorporates a polishing pad attached to a pad head, along with a slurry supply to deliver a slurry onto the wafer. An injection port situated in the second region of the platen is designed to inject a predetermined gas to the edge of the wafer’s bottom surface, enhancing the polishing process.

In addition, he has developed a **Polishing Pad for Chemical Mechanical Polishing Process and Chemical Mechanical Polishing Apparatus Including the Same**. This invention includes a platen that supports and rotates a wafer, paired with a polishing pad that contains a body featuring a groove with a rotational symmetric pattern. These innovations are crucial for improving the quality of surface finishes in semiconductor devices.

Career Highlights

One-Moon Chang is currently affiliated with Samsung Electronics Co., Ltd., a leading global technology company. His expertise in chemical mechanical polishing has allowed him to advance the capabilities of semiconductor manufacturing, significantly impacting production quality and efficiency in the industry.

Collaborations

Throughout his career, One-Moon Chang has collaborated with esteemed colleagues, such as Soo-Young Tak and Jong-Sun Ahn. These partnerships have fostered an environment of innovation and technological advancement within their projects, further enhancing the effectiveness of their inventions.

Conclusion

As a prominent inventor in the realm of chemical mechanical polishing, One-Moon Chang continues to push the boundaries of semiconductor manufacturing technology. His inventive spirit and collaboration with other skilled professionals underscore the importance of teamwork in driving innovation. With his contributions, the semiconductor industry stands to benefit greatly, paving the way for future advancements.