Ole D Krogh

Title: Ole D Krogh: Innovator in Semiconductor Processing

Introduction

Ole D Krogh, an accomplished inventor based in San Francisco, CA, is renowned for his contributions to the field of semiconductor processing. With a remarkable portfolio of six patents, Krogh has made significant strides in developing innovative methods and apparatuses that enhance the efficiency and precision of etch processes.

Latest Patents

Krogh’s latest patent, titled "Method and apparatus for poly gate CD control," introduces groundbreaking systems and methods that facilitate semiconductor processing, particularly focusing on etch processes. This invention offers real-time two-dimensional etch rate control, effectively enhancing the precision of semiconductor fabrication. By selecting a control model pertinent to the etch process prior to its commencement, Krogh has developed a formula that predicts optimal process parameters for achieving desired etch rates. During fabrication, critical dimension measurements of a polysilicon gate are utilized to modify the etch process, ultimately ensuring that the resultant polysilicon gate possesses a desired rectangular profile.

Another notable patent by Krogh addresses the issue of cleaning residue from processing chamber components. This patent, related to the "Cleaning process residues on a process chamber component," outlines a method for effectively removing residues from the surface of a substrate processing chamber component with holes. The innovative approach involves immersing the component in a cleaning solution containing hydrofluoric acid and nitric acid, while simultaneously passing a non-reactive gas through the holes, thus preventing back-flow of the cleaning solution during the process. This method proves particularly useful for cleaning sputtering residue deposits from electrostatic chucks in sputtering processes.

Career Highlights

Throughout his career, Ole D Krogh has worked with several prominent companies in the semiconductor industry, including Tegal Corporation. His experience in these organizations has allowed him to hone his skills and contribute to advancements in semiconductor processing technology.

Collaborations

Krogh has collaborated with talented individuals in his field, notably with Ali Sadeghi and Sukesh Janubhai Patel. These collaborations have fostered a creative environment that has led to significant innovations in semiconductor technology.

Conclusion

Ole D Krogh's relentless pursuit of innovation has positioned him as a key figure in the field of semiconductor processing. His patents not only demonstrate his expertise but also contribute to the ongoing advancement of technology in this critical industry. Through his work, Krogh continues to inspire the next generation of inventors and researchers in the realm of semiconductor advancements.