Oded Kaminsky

Title: Oded Kaminsky: Innovator in Optical Metrology

Introduction

Oded Kaminsky is a notable inventor based in Givat Shemuel, Israel. He has made significant contributions to the field of optical metrology, holding 2 patents that focus on enhancing measurement accuracy in various applications. His innovative methods are designed to analyze and utilize landscapes to improve metrology processes.

Latest Patents

Kaminsky's latest patents include a method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology. This method provides techniques for deriving a partially continuous dependency of metrology metrics on recipe parameters. It involves analyzing the derived dependency to determine a metrology recipe and conducting measurements accordingly. The analysis may take the form of a sensitivity landscape, where regions of low sensitivity and points of low or zero inaccuracy are identified. This approach optimizes measurements and enhances robustness against inaccuracies.

Another significant patent focuses on methods and modules for focus metrology that utilize transformations based on aerial images of targets. This innovation allows for the sharing of measurement information derived from multiple targets and facilitates the design of additional targets that comply with specified requirements. The methods involve positioning multiple focus targets in each wafer field, conducting measurements, and transforming the results into a unified set for analysis.

Career Highlights

Throughout his career, Oded Kaminsky has worked with prominent companies in the industry, including Kla Corporation and KLA-Tencor Corporation. His experience in these organizations has contributed to his expertise in optical metrology and innovation.

Collaborations

Kaminsky has collaborated with notable colleagues such as Yoel Feler and Tal Marciano. These partnerships have likely fostered a creative environment that encourages the development of cutting-edge technologies in metrology.

Conclusion

Oded Kaminsky is a distinguished inventor whose work in optical metrology has led to significant advancements in measurement accuracy. His innovative patents and collaborations reflect his commitment to enhancing the field and addressing challenges in metrology.