Company Filing History:
Years Active: 1995-2013
Title: Noriaki Yokono: Innovator in Substrate Processing Technologies
Introduction
Noriaki Yokono is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 4 patents. His innovative work focuses on enhancing the efficiency and effectiveness of substrate processing systems.
Latest Patents
Yokono's latest patents include a substrate processing apparatus, a substrate processing system, and an inspection/periphery exposure apparatus. The edge exposure unit he developed features a projector, a projector holding unit, a substrate rotating unit, an outer edge detecting unit, and a surface inspection processing unit. Each component of the projector holding unit is designed to move the projector in both X and Y directions. The projector irradiates the peripheral portion of a substrate with light transmitted from a light source for exposure through a light guide. Edge sampling processing is performed based on the distribution of light received in a CCD line sensor of the outer edge detecting unit. Additionally, surface inspection processing is conducted based on the distribution of light received in a CCD line sensor of the surface inspection processing unit.
The substrate processing apparatus control system he designed connects a substrate processing apparatus with an exposure apparatus. A pilot substrate, subjected to a series of preprocessing steps, is transported to an inspection unit. The inspection result determination part compares the results from the inspection unit with substrate condition data. When requirements are not satisfied, a condition change instruction part alters the processing conditions of each processing unit. This operation is repeated until the inspection results meet the requirements, allowing the processing control part to execute actual processing according to recipe data. This innovation significantly improves the efficiency of changing processing conditions in response to inspection results.
Career Highlights
Throughout his career, Noriaki Yokono has worked with notable companies such as Dainippon Screen Manufacturing Co., Ltd. and Sokudo Co., Ltd. His experience in these organizations has contributed to his expertise in substrate processing technologies.
Collaborations
Yokono has collaborated with esteemed colleagues, including Masami Nishida and Masahiro Himoto. Their combined efforts have further advanced the field of substrate processing.
Conclusion
Noriaki Yokono's contributions to substrate processing technologies have established him as a key innovator in the industry. His patents reflect a commitment to improving processing efficiency and effectiveness, making a lasting impact on the field