The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Aug. 27, 2010
Masahito Kashiyama, Kyoto, JP;
Yukihiko Inagaki, Kyoto, JP;
Kazuya Akiyama, Kyoto, JP;
Noriaki Yokono, Kyoto, JP;
Isao Taniguchi, Kyoto, JP;
Masahito Kashiyama, Kyoto, JP;
Yukihiko Inagaki, Kyoto, JP;
Kazuya Akiyama, Kyoto, JP;
Noriaki Yokono, Kyoto, JP;
Isao Taniguchi, Kyoto, JP;
Sokudo Co., Ltd., , JP;
Abstract
An edge exposure unit includes a projector, a projector holding unit, a substrate rotating unit, an outer edge detecting unit and a surface inspection processing unit. Each component of the projector holding unit operates to move the projector in an X direction and a Y direction. The projector irradiates a peripheral portion of a substrate with light transmitted from a light source for exposure through a light guide. Edge sampling processing is performed based on distribution of an amount of light received in a CCD line sensor of the outer edge detecting unit. Surface inspection processing is performed based on distribution of an amount of light received in a CCD line sensor of the surface inspection processing unit.