Company Filing History:
Years Active: 1990-2013
Title: Kazuya Akiyama: Innovator in Substrate Processing Technology
Introduction
Kazuya Akiyama is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of eight patents. His innovative work has advanced the technology used in various industrial applications.
Latest Patents
Akiyama's latest patents include a substrate processing apparatus, a substrate processing system, and an inspection/periphery exposure apparatus. The edge exposure unit he developed features a projector, a projector holding unit, a substrate rotating unit, an outer edge detecting unit, and a surface inspection processing unit. Each component of the projector holding unit is designed to move the projector in both X and Y directions. The projector irradiates the peripheral portion of a substrate with light transmitted from a light source for exposure through a light guide. Edge sampling processing is conducted based on the distribution of light received in a CCD line sensor of the outer edge detecting unit. Additionally, surface inspection processing is performed based on the distribution of light received in a CCD line sensor of the surface inspection processing unit.
Another notable invention is the edge exposing apparatus, which includes a photo detector and a lighting time measuring circuit. This apparatus detects a decrease in performance of light source units. The lighting time measuring circuit identifies the ready state of the light source units by measuring the lighting time for startup. When a decrease in performance is detected, a replacement light source unit is activated while continuing edge exposure with other light source units.
Career Highlights
Throughout his career, Akiyama has worked with notable companies such as Dainippon Screen Manufacturing Co., Ltd. and Sokudo Co., Ltd. His experience in these organizations has contributed to his expertise in substrate processing technology.
Collaborations
Akiyama has collaborated with several professionals in his field, including Kenji Kamei and Toru Azuma. These collaborations have further enhanced his innovative capabilities and contributions to technology.
Conclusion
Kazuya Akiyama is a distinguished inventor whose work in substrate processing technology has led to significant advancements in the industry. His patents reflect his commitment to innovation and excellence in engineering.
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