The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2005
Filed:
Sep. 23, 2002
Tamihiro Bun, Kyoto, JP;
Kinya Murata, Kyoto, JP;
Kenji Hashinoki, Kyoto, JP;
Kenji Kamei, Kyoto, JP;
Noriaki Yokono, Kyoto, JP;
Kenji Sugimoto, Kyoto, JP;
Tsuyoshi Mitsuhashi, Kyoto, JP;
Tamihiro Bun, Kyoto, JP;
Kinya Murata, Kyoto, JP;
Kenji Hashinoki, Kyoto, JP;
Kenji Kamei, Kyoto, JP;
Noriaki Yokono, Kyoto, JP;
Kenji Sugimoto, Kyoto, JP;
Tsuyoshi Mitsuhashi, Kyoto, JP;
Abstract
A controller is connected to a substrate processing apparatus and an exposure apparatus. A pilot substrate subjected to a series of processing as preprocessing is transported to an inspection unit. An inspection result determination part compares inspection results received from the inspection unit with substrate condition data so that a condition change instruction part changes the processing condition of each processing unit when no requirement is satisfied. This operation is so repeated that a processing control part executes actual processing according to recipe data when the inspection results satisfy the requirement. Thus, the efficiency a step of changing the processing condition of each processing part in response to the inspection results in the inspection part is improved in preprocessing executed in the substrate processing apparatus.