Kinya Murata

**Title: Kinya Murata: Innovating Substrate Processing Technology in Kyoto**

Introduction

Kinya Murata, based in Kyoto, Japan, is a notable inventor recognized for his contributions to substrate processing technology. His work is characterized by a focus on enhancing the efficiency of processing systems, which holds significant importance in semiconductor manufacturing.

Latest Patents

Kinya Murata holds a patent for a "Substrate processing apparatus control system and substrate processing apparatus". This innovative system incorporates a controller linked to both a substrate processing apparatus and an exposure apparatus. The process involves transporting a pilot substrate through a series of preprocessing steps to an inspection unit. An inspection result determination component evaluates the inspection results against substrate condition data. If the requirements are not satisfied, a condition change instruction part modifies the processing condition of each unit. Through repetitive operations, the processing control part carries out actual processing according to recipe data once the inspection results meet the specified requirements. This approach significantly improves the efficiency of changing processing conditions based on inspection feedback during the preprocessing within the substrate processing apparatus.

Career Highlights

Kinya Murata is employed at Dainippon Screen Manufacturing Co., Ltd., a company renowned for its technological advancements in the fields of printing and semiconductor equipment. His work there has allowed him to contribute valuable innovations that impact not only his organization but also the broader industry.

Collaborations

Throughout his career, Kinya has collaborated with esteemed colleagues, including Tamihiro Bun and Kenji Hashinoki. Their collective expertise has fostered an environment of innovation, leading to advancements in substrate processing technology and enhancing overall operational efficiency.

Conclusion

Kinya Murata stands as a significant figure in the realm of substrate processing. His innovative patent and collaborative efforts with skilled coworkers reflect a commitment to advancing technology in Kyoto, Japan. Through his work, he continues to shape the future of substrate processing apparatus, driving efficiency and innovation in the industry.