Company Filing History:
Years Active: 2005-2007
Title: **Innovative Contributions of Nobutaka Ohyagi in Semiconductor Manufacturing**
Introduction
Nobutaka Ohyagi is a distinguished inventor based in Kawasaki, Japan, known for his significant contributions to the field of semiconductor manufacturing. With an impressive portfolio that includes two patents, his innovative approaches have paved the way for advancements in semiconductor device production.
Latest Patents
Ohyagi's latest patents include a method of manufacturing semiconductor devices that enhances the production efficiency and quality of semiconductor components. In one of his patents, a tungsten (W) plug is formed followed by the creation of a W oxidation preventing barrier metal film. Subsequently, an SiON film thinner than this barrier is formed, and an Ar sputter etching process is utilized, resulting in a gentler surface shape of the SiON film and the disappearance of deep trenches. Additionally, a voidless W oxidation preventing insulating film is achieved through the combination of the SiON films. His second patent details a method that incorporates the formation of titanium silicide layers on a silicon substrate, various etching steps, and cleaning processes, ensuring precise manufacturing of semiconductor devices.
Career Highlights
Ohyagi is currently employed by Fujitsu Corporation, a leading enterprise in technology and innovation. His work at Fujitsu demonstrates his dedication to advancing semiconductor technology and highlights the importance of innovative thinking in contemporary engineering practices.
Collaborations
Throughout his career, Nobutaka Ohyagi has collaborated with esteemed colleagues such as Yasutaka Ozaki and Tatsuya Yokota. These collaborations reflect a collective commitment to pushing the boundaries of semiconductor manufacturing and driving progress in the field.
Conclusion
In summary, Nobutaka Ohyagi's innovative spirit and technical expertise significantly contribute to the advancement of semiconductor technology. His patents represent crucial steps in improving manufacturing processes, showcasing the vital role inventors like him play in shaping the future of electronics and technology.