Nobuaki Miyagawa

Title: Nobuaki Miyagawa: Innovator in Extreme Ultraviolet Light Technology

Introduction

Nobuaki Miyagawa is a prominent inventor based in Tokyo, Japan. He is known for his contributions to the field of extreme ultraviolet light technology. His innovative work has led to the development of a significant patent that addresses critical challenges in this area.

Latest Patents

Miyagawa holds a patent for an "Extreme Ultraviolet Light Source Device and Protection Method for Receiving Plate Member." This invention includes a light source part that generates plasma to emit extreme ultraviolet light. The apparatus features a storage vessel for waste material and a corrosion-resistant member that protects the receiving plate member from damage caused by the melt of waste material and debris.

Career Highlights

Miyagawa is associated with Ushio Denki Kabushiki Kaisha, a company that specializes in advanced light source technologies. His work at Ushio Denki has been instrumental in advancing the capabilities of extreme ultraviolet light sources, which are essential for various applications, including semiconductor manufacturing.

Collaborations

Miyagawa collaborates with Hironobu Yabuta, a fellow innovator in the field. Their partnership has contributed to the development of cutting-edge technologies that enhance the efficiency and effectiveness of extreme ultraviolet light sources.

Conclusion

Nobuaki Miyagawa's contributions to extreme ultraviolet light technology exemplify the impact of innovative thinking in addressing complex challenges. His patent and work at Ushio Denki continue to influence advancements in this critical field.