The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Aug. 05, 2021
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Hironobu Yabuta, Tokyo, JP;
Nobuaki Miyagawa, Tokyo, JP;
USHIO DENKI KABUSHIKI KAISHA, , JP;
Abstract
An extreme ultraviolet light source apparatus includes a light source part for generating a plasma that emits extreme ultraviolet light with use of excitation of a raw material for emitting extreme ultraviolet light; a storage vessel for storing a melt of a waste material including the raw material and a melt of particles of debris that are emitted from the plasma; a receiving plate member having a receiving surface; and a corrosion-resistant member disposed on the receiving surface of the receiving plate member, the corrosion-resistant member being more corrosion-resistant to the melt of the waste material and the melt of the debris than the receiving plate member, the corrosion-resistant member receiving the melt of the waste material and the melt of the debris and guiding the melt of the waste material and the melt of the debris into the storage vessel.