Ushio Denki Kabushiki Kaisha

Nobuaki Miyagawa

Hironobu Yabuta

An extreme ultraviolet light source apparatus includes a light source part for generating a plasma that emits extreme ultraviolet light with use of excitation of a raw material for emitting extreme ultraviolet light; a storage vessel for storing a melt of a waste material including the raw material and a melt of particles of debris that are emitted from the plasma; a receiving plate member having a receiving surface; and a corrosion-resistant member disposed on the receiving surface of the receiving plate member, the corrosion-resistant member being more corrosion-resistant to the melt of the waste material and the melt of the debris than the receiving plate member, the corrosion-resistant member receiving the melt of the waste material and the melt of the debris and guiding the melt of the waste material and the melt of the debris into the storage vessel.

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Tokyo, Japan

Nobuaki Miyagawa