Yokohama, Japan

Noboru Fuse


Average Co-Inventor Count = 2.6

ph-index = 3

Forward Citations = 110(Granted Patents)


Company Filing History:


Years Active: 1990-1993

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3 patents (USPTO):Explore Patents

Title: Noboru Fuse: Innovator in Semiconductor Technologies

Introduction

Noboru Fuse is a notable inventor based in Yokohama, Japan, recognized for his significant contributions to semiconductor technology. With a total of three patents to his name, Fuse's inventions reflect precision engineering and innovation, especially in wafer processing systems.

Latest Patents

One of his latest patents is the "Vertical Wafer Heat Treatment Apparatus Having Dual Load Lock Chambers." This innovative apparatus is designed to form films and perform dry etching on a plurality of wafers stored in a wafer boat. It features first and second load lock chambers connected by a gate, ensuring that inert gas can be independently introduced and exhausted in each chamber. The load lock chambers are vertically connected to separate process containers, and an elevator system facilitates the transfer of wafer boats into and out of the first container. Additionally, Fusion has developed an "Apparatus for Reaction Treatment," crucial in semiconductor manufacturing processes. It employs a reaction gas to treat substrates within a specially designed reaction region, preventing the adhesion of reaction compound particles by regulating the pressure between the inner and outer regions.

Career Highlights

Throughout his career, Noboru Fuse has worked with prestigious companies such as Tel Sagami Limited and Tokyo Electron Limited. His work at these organizations has significantly impacted the field of semiconductor manufacturing technology, enhancing efficiency and reliability in various processes.

Collaborations

Fuse has collaborated with notable professionals in the industry, including Hirofumi Kitayama and Hisashi Hattori. Together, these collaborations have contributed to advancements in semiconductor technologies and various innovative solutions that continue to drive the industry forward.

Conclusion

Noboru Fuse stands out as a leading figure in semiconductor innovation. With his patents advancing heat treatment and reaction processes, his work not only benefits the technology sector but also sets a foundation for further developments in the industry. As he continues to push the boundaries of what's possible, Fuse remains a significant contributor to the evolution of semiconductor technologies.

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