Location History:
- Hachiouji, JP (2003)
- Hachioji, JP (2003 - 2004)
Company Filing History:
Years Active: 2003-2004
Title: Naruhiko Nakanishi: Innovator in Semiconductor Technology
Introduction
Naruhiko Nakanishi is a prominent inventor based in Hachioji, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing the reliability and integration of semiconductor devices, particularly in the realm of memory storage.
Latest Patents
Nakanishi's latest patents include a method of forming a semiconductor device with a capacitor that incorporates a polycrystalline tantalum oxide film dielectric. This innovation leads to an integrated semiconductor device that boasts improved reliability and is suitable for a higher degree of integration without compromising the accumulated electric charge of each information storage capacity element. The design features a DRAM with memory cells, each comprising an information storage capacity element connected in series to a memory cell selection MISFET formed on the main surface of a semiconductor substrate. The lower electrode is made of a ruthenium film oriented in a specific plane, while the capacity insulating film is crafted from a polycrystalline tantalum film that undergoes thermal treatment for crystallization.
Another notable patent is for a semiconductor integrated circuit device and the method of producing it. This invention involves forming plug electrodes of silicon that are buried in through holes in a first insulating film, ensuring electrical connection to the source and drain regions of a MISFET on the semiconductor substrate's main surface. A second insulating film is then deposited, with holes formed to expose the silicon plug electrodes. A barrier film is applied to the surfaces of the silicon plugs, and a dielectric is formed in the holes to create lower electrodes for the capacitor elements.
Career Highlights
Nakanishi is currently employed at Hitachi, Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in developing devices that meet the demands of modern electronics.
Collaborations
Throughout his career, Nakanishi has collaborated with notable colleagues, including Yasuhiro Sugawara and Misuzu Kanai. Their combined expertise has contributed to advancements in semiconductor innovations.
Conclusion
Naruhiko Nakanishi's contributions to semiconductor technology have established him as a key figure in the field. His innovative patents reflect a commitment to enhancing device reliability and integration, paving the way for future advancements in electronics.