Gunma, Japan

Naotaka Toyama


Average Co-Inventor Count = 4.2

ph-index = 2

Forward Citations = 17(Granted Patents)


Location History:

  • Gumma-gun, JP (2002)
  • Gunma, JP (2003 - 2012)

Company Filing History:


Years Active: 2002-2012

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4 patents (USPTO):Explore Patents

Title: Naotaka Toyama: Innovator in Wafer Polishing Technology

Introduction

Naotaka Toyama is a prominent inventor based in Gunma, Japan. He has made significant contributions to the field of wafer polishing technology, holding a total of 4 patents. His innovative methods have advanced the manufacturing processes in the semiconductor industry.

Latest Patents

Toyama's latest patents include a method for manufacturing polishing pads and a method for polishing wafers. The method for manufacturing a polishing pad involves creating a urethane foam pad that is attached to a turntable for wafer polishing. This process includes slicing a urethane foam cake to provide the pad and performing press processing with a pressure of 15,000 g/cm or above. This method ensures the production of polishing pads that can achieve high flatness in the wafers. Additionally, his wafer polishing method incorporates a protective film to prevent etching and contamination during the polishing process. This film is designed to be easily removed after polishing, enhancing the efficiency of wafer cleaning.

Career Highlights

Toyama is currently employed at Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor materials industry. His work has been instrumental in developing techniques that improve the quality and efficiency of wafer processing.

Collaborations

Throughout his career, Toyama has collaborated with notable colleagues, including Hisashi Masumura and Kouichi Okamura. These partnerships have contributed to the advancement of innovative solutions in wafer technology.

Conclusion

Naotaka Toyama's contributions to wafer polishing technology exemplify his dedication to innovation in the semiconductor industry. His patents reflect a commitment to improving manufacturing processes and achieving high-quality results.

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