Location History:
- Kurokawa, JP (2015)
- Kurokawa-gun, JP (2017)
- Miyagi, JP (2021 - 2023)
Company Filing History:
Years Active: 2015-2025
Title: Naokazu Furuya: Innovator in Exhaust and Plasma Processing Technologies
Introduction
Naokazu Furuya is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the fields of exhaust devices and plasma processing apparatuses. With a total of 6 patents to his name, Furuya continues to push the boundaries of innovation in his industry.
Latest Patents
Furuya's latest patents include an exhaust device and a plasma processing apparatus. The exhaust device features an exhaust mechanism that includes a first blade unit and a second blade unit, both arranged coaxially around a workpiece. This design allows for efficient gas exhaust in a processing vessel. The plasma processing apparatus is designed to accommodate multiple substrates and includes various components such as substrate supports and radio-frequency power sources, ensuring effective plasma generation without interference.
Career Highlights
Furuya is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on developing advanced technologies that enhance processing efficiency and effectiveness.
Collaborations
Furuya collaborates with talented coworkers, including Kazuya Nagaseki and Kazuki Moyama. Their combined expertise contributes to the innovative projects at Tokyo Electron Limited.
Conclusion
Naokazu Furuya is a key figure in the development of exhaust and plasma processing technologies. His innovative patents and contributions to Tokyo Electron Limited highlight his commitment to advancing the field.