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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10943766 B1

PDFFull Text
Date of Patent:
Mar. 09, 2021

Filed:

Jun. 25, 2018

Power feed member and substrate processing apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Shunichi Ito, Miyagi, JP;

Shinji Himori, Miyagi, JP;

Etsuji Ito, Miyagi, JP;

Naokazu Furuya, Miyagi, JP;

Gen Tamamushi, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Pearne & Gordon LLP

Primary Examiner:

Ram N Kackar

Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32027 (2013.01); H01J 37/32449 (2013.01); H01J 37/32522 (2013.01); H01J 37/32697 (2013.01); H01J 37/32724 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01L 21/68792 (2013.01); H01J 2237/334 (2013.01);
Abstract

A power feed member having high heat insulation and capable of transmitting a power at a low loss is provided. The power feed member configured to supply a power includes a first conductive member; a second conductive member; and a connecting member configured to electrically connect the first conductive member and the second conductive member. At least a part of the connecting member is formed of a porous metal or multiple bulk metals.

Find Patent Forward Citations

Ito, Shunichi. (2021). Power feed member and substrate processing apparatus (U.S. Patent No. 10943766). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10943766

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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