Company Filing History:
Years Active: 2007-2010
Title: Nancy J Wheeler: Innovator in Semiconductor Technology
Introduction
Nancy J Wheeler is a prominent inventor based in Mountain View, CA. She has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase her innovative spirit and technical expertise.
Latest Patents
Her latest patents include a device having etched features with shrinkage carryover. This invention addresses the challenges associated with critical dimension scanning electron microscope (CD-SEM) characterization locations. The device features a first etched element with distinct sections, where the middle section experiences severe shrinkage compared to a similar feature not located in a CD-SEM characterization area. Another notable patent focuses on characterizing resist line shrinkage due to CD-SEM inspection. This system aims to identify and mitigate the effects of CD-SEM measurements on resist, ensuring more reliable measurements and preventing damage to the features being analyzed.
Career Highlights
Nancy J Wheeler is currently employed at Intel Corporation, where she continues to push the boundaries of semiconductor technology. Her work has been instrumental in enhancing the accuracy and reliability of CD-SEM measurements, which are critical for the advancement of semiconductor manufacturing processes.
Collaborations
Throughout her career, Nancy has collaborated with esteemed colleagues, including Gary X Cao and George K Chen. These partnerships have fostered a dynamic environment for innovation and have contributed to the success of her projects.
Conclusion
Nancy J Wheeler exemplifies the spirit of innovation in the semiconductor industry. Her patents and contributions reflect her dedication to advancing technology and improving measurement techniques in semiconductor manufacturing.