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Fukushima, Japan

Nakaji Miura

USPTO Granted Patents = 3

Average Co-Inventor Count = 3.8

ph-index = 2

Forward Citations = 98(Granted Patents)

Location History:

Shirakawa, JP (1998)
Nishi-shirakawa-gun, JP (2000)
Fukushima, JP (2005)

Company Filing History:

Shin-etsu Handotai Co., Ltd.

Years Active: 1998-2005

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6884154 - Method for apparatus for polishing outer peripheral chamfered part of wafer (2005-04-26),

2. 6074442 - Method of separating slice base mounting member from wafer and jig (2000-06-13),

3. 5806137 - Washing of wafers and wafer washing and drying apparatus (1998-09-15),

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