This inventor holds 5 USPTO granted patents. Top assignees: Mitsubishi Denki Kabushiki Kaisha, Mitsubishi Electric Engineering Company, Limited, Renesas Technology Corp.. Active years: 2000-2005.
Location History:
- Tokyo, JP (2000 - 2003)
- Hyogo, JP (2000 - 2005)
Company Filing History:
4 out of 21,351 
2 out of 177 
1 out of 3,781 
Years Active: 2000-2005
Title: The Innovations of Mutumi Tuda
Introduction
Mutumi Tuda is a notable inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing the performance and efficiency of plasma processing apparatuses and semiconductor devices.
Latest Patents
One of Tuda's latest patents is a plasma processing apparatus capable of evaluating process performance. This invention features a high-frequency current detector that identifies high-frequency currents produced when power is supplied to a chamber. The detector sends this information to a computer, which compares it to a reference current to assess the process performance. If the currents match, the process is deemed normal; otherwise, it is considered abnormal. This innovation allows for the detection of high-frequency characteristics specific to the apparatus, facilitating performance evaluation.
Another significant patent is a method of manufacturing semiconductor devices that prevents tapering of gate electrode edges. This method involves a main etching process that exposes a dielectric film on a semiconductor substrate. Following this, residues of the electrode material are removed using a two-step etching process with specific gas mixtures. This technique enhances the precision of semiconductor device fabrication.
Career Highlights
Throughout his career, Mutumi Tuda has worked with prominent companies such as Mitsubishi Denki Kabushiki Kaisha and Mitsubishi Electric Engineering Company, Limited. His experience in these organizations has contributed to his expertise in semiconductor technology and plasma processing.
Collaborations
Tuda has collaborated with notable colleagues, including Toshio Komemura and Minoru Hanazaki. Their joint efforts have likely fostered advancements in their respective fields.
Conclusion
Mutumi Tuda's innovative contributions to semiconductor technology and plasma processing apparatuses highlight his role as a significant inventor. His patents reflect a commitment to improving process performance and manufacturing methods in the industry.