Mohammad Kamarehi

Title: Mohammad Kamarehi: Inventor in Microwave-Assisted ALD Technology.

Introduction

Mohammad Kamarehi is an inventor associated with MKS Inc. and based in Andover, Massachusetts. His patent work concerns microwave technology for atomic layer deposition (ALD), a process used in materials and surface engineering.

Latest Patents

The provided information identifies one patent associated with Kamarehi: “Microwave system for microwave-assisted surface chemistry annealing of ALD processes utilizing microwave radiation energy.” The invention describes a system that generates and delivers microwave energy into a processing chamber used for microwave-assisted thermal ALD. Its components include a microwave generator, waveguide assembly, isolators to reduce signal backscatter, a tuning device, and a microwave delivery device. Together, these elements are designed to direct microwave energy into the chamber for surface chemistry annealing during ALD processes. Kamarehi is credited with 1 patent in the information provided.

Career Highlights

Kamarehi’s listed invention focuses on integrating controlled microwave energy with thermal ALD equipment. The system’s waveguide, isolation, tuning, and delivery components address the transmission of microwave signals from the generator to the processing chamber.

Collaborations

The provided information lists Ilya Pokidov and Kenneth B. Trenholm as Kamarehi’s coworkers. It does not specify their roles in the patent or establish that they were co-inventors.

Conclusion

Mohammad Kamarehi’s documented patent work at MKS Inc. centers on a microwave system designed to support surface chemistry annealing in ALD processes.